With widespread use of electronic devices the semiconductor industry has seen a lot of changes in manufacture of semiconductor devices.

Out of various stages for semiconductor manufacturing, fabrication process is one of the most important steps. For fabrication of functional layers over a substrate, the most commonly used technique is CVD (Chemical vapor Deposition).

CVD is done in various processes. One of them is HFCVD (Hot Filament Chemical Vapor Deposition). The Blue Wave hot filament chemical vapor deposition system was built to produce concentrated, dense, adherent and coherent poly-crystalline diamond films on silicon, metallic and ceramic substrates.

The HFCVD mechanism is advantageous as it provides the poly-crystalline deposits of considerable uniform micro-structure. It can be scaled for production or large area deposition at lower cost.

The machine is designed to deposit various forms of diamond coatings (UNCD-ultra nano crystalline diamond, NCD-nano crystalline diamond) poly-crystalline diamond films and 2D carbon- that is graphene, which have broad use in electronic industry.

Equipment specifications:

This product has various fruitful features, which are mentioned below:

1. Specially designed substrate heater to attain a maximum temperature of 800 C, with a facility for rotational capacity of 20 RPM for the substrate and vertical movement of 20-80 mm.
2. A unique gas distribution system with mass flow controllers and bellow-sealed valves to ensure a controllable feed for deposition of mixed gases like methane, oxygen, acetylene and hydrogen.
3. A specially designed-filament holder assembly made of molybdenum, with multiple Tungsten wires operating with an LT power supply for heating up the gases.
4. A state of the art PC-based control system with PLC or Lab View software, for total automatic system.
5. A molybdenum holder, with biasing capability.
6. A unique design of the sample holder, load lock transfer, and gas shower to provide proper distribution of gases for plasma generation and decomposition of the gases in the heated reactor area.
7. A unique design of the sample holder, load lock transfer, and gas shower to provide proper distribution of gases for plasma generation and decomposition of the gases in the heated reactor area.

If you want to have the above specifications, you must choose the Blue Wave system to buy. You can contact them at anytime as they are available in all 365 days.