Blue Wave Exhibits at Fall MRS 2024

Blue Wave Semiconductors presented its latest innovation, the DEAR-MPCVD system (Diamond Exploratory & Applied Research Microwave Plasma CVD), at Fall MRS 2024, held in Boston, Massachusetts. This machine represents groundbreaking technology in CVD diamond growth and thin-film deposition processes.

The DEAR-MPCVD system enables the synthesis of CVD diamond with various film qualities, including epitaxially grown, single crystal growth, polycrystalline, microcrystalline, and nanocrystalline coating layers (both doped and undoped) for diverse applications. It supports doped epilayer studies, aiding in device prototyping and simplifying quantum center studies.

Its deposition chamber, designed with a quartz tube, enhances CVD diamond crystal growth by eliminating silicon impurities from the quartz walls. The system is equipped with an interchangeable quartz tube that creates a multi-dopant system required for future breakthroughs in quantum and electronic-grade diamonds. The system features a microwave CVD system with a 1.5 kW microwave power supply. The substrate holder integrates a water-cooled molybdenum sample stage with adjustable height, allowing precise temperature control of the substrate from 700°C to 1200°C using a molybdenum disk.

During the exhibition, attendees explored the machine’s capabilities through interactive displays and sessions. Blue Wave Semiconductors’ participation in Fall MRS 2024 marks a significant milestone in its journey of innovation and collaboration. By engaging with global audiences, the company aims to foster partnerships that drive transformative solutions in the CVD diamond research industry.