Nanofurnace System
The Nanofurnace Deposition System is a state-of-the-art thermal chemical vaporization system with a quartz reactor designed for growing nano deposition materials on a wide variety of substrates. This system is an excellent tool for nano materials metal-oxides, nitrides, metals, and carbon materials such as CNTs and graphene.
- Description
- Specification
- Brochure
- Photos
- Videos
Product Description
Applications
- Carbon Nanotubes
- Graphene Synthesis
- ZnO nanowires
- Substrate Annealing
- Oxidation
Features
- High temperature quartz tube reactor design
- Excellent temperature uniformity over T length
- Thermal Process ranging from RT to 1100°C
- Mechanical vacuum pump for low pressure TCVD (base pressure better than 5E-2Torr)
Custom Options Available:
- Liquid bubbler for liquid precursors
- Automated process pressure controller
- Auxiliary gas mass flow controllers
Product Specification
We’re updating the contents on this page, please check back again soon!
Brochure
We’re updating the contents on this page, please check back again soon!
Photos
We’re updating the contents on this page, please check back again soon!
Videos
We’re updating the contents on this page, please check back again soon!