Thermal Evaporation System
Blue Wave Thermal Evaporation System is one of the simplest of the Physical Vapor Deposition (PVD) tool available in the market. It is a fully customizable state-of-the-art physical vapor deposition system designed for synthesis of high quality metal and oxide thin films. In addition, the system can be used for single layer or multi layer metal thin films (Al. Au. Pt. Ag. Cu. Ti. Cr. etc.). oxides (Mn03. TiO2. Al203). and organic OLEDs and multi layer thin films. Blue Wave has developed Thermal Evaporation System which offers a variety of in-built and custom features such as:
- High vacuum system (Available in benchtop and standalone machine
- Ability to hold any shape and size substrate using simple clamp technique
- Capable of multiple evaporation sources with cross contamination shield
- Shutter option for evaporation source (manual, pneumatic and programmed)
- Cross contamination shield for multiple source usage 6: Optional thin film thickness monitor
- Optimized filament to substrate distance 8: Mass flow Controllers 9: Process Pressure Adjustment
- Easy integration with a variety of other deposition techniques such as PLD. E-Beam. Sputtering and more.
- Description
- Specification
- Brochure
- Photos
- Videos
Product Description
Blue Wave Thermal Evaporation System uses resistive heating technique. In this technique. a pair of water-cooled high current vacuum electrical feedthroughs are used to heat a boat (alumina coated titanium or alumina coated molybdenum) or a coil (tungsten) as the heating element. These boats/coils have a trench or slot for placing the evaporation sources (deposition material in the form of pellets. balls or random pieces) in them. When significant amount of current is passed through the feedthrough. the evaporation source is melted and evaporated. The rate of deposition depends on the amount of the current passed through i.e. higher the current. higher is the deposition rate and vice versa. This deposition process is recommended to be performed at low pressures where the mean free path is longer than the distance of the substrate from the evaporation source.
Applications
- Metallic Coatings
- Oxides
- Nitrides
- Organic OLEDs
- Multilayer films
Features
Simplified thermal evaporation process for evaporation of metals such as aluminum. titanium, chromium, gold, silver, and more.
Capable of holding multiple evaporation sources
Custom Options Available:
- BWS rotating substrate heater capable of reaching temperatures up to 850°C
- Linear motion z-stage for vertical position adjustment of the Substrate
- Quick access door for sample and filament holder loading and unloading
- Thin film deposition controller
- Automated system control via LabView software
- Stainless steel gate valve
Product Specification
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Brochure
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Photos
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Videos
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