Laser reflectance interferometry tool (LRI) is developed for in-situ measurement of the growth characteristics of carbon based thin films materials. LRI tool integrated with hot-filament CVD (HFCVD) was used to grow films of diamond, nanodiamond,...
Read More ›Highly boron doped diamond films were produced using Blue Wave HFCVD reactor over 2” silicon wafers. The morphology and structure of the boron doped diamond films were evaluated by scanning electron microscopy, x-ray diffraction and Raman...
Read More ›Blue Wave Semiconductors exhibited at the 12th annual International Advanced Materials Conference in Qingdao, China. Thank you to everybody who stopped by the Blue Wave Booth, it was a great trip for our first trime in...
Read More ›Dr. RD Vispute presented a contributed oral presentation at the AVS 60th International Symposium and Exhibition. The title of his talk was Innovative Thin Film Deposition Tools for R&D from Blue Wave Semiconductors.” Read more about AVS...
Read More ›Blue Wave’s work on nanodiamond foils is featured by MRS in their Meeting Scene newsletter for days one and two of the fall MRS convention. Blue Wave is featured in the technical sessions segment. For more information on this work including our...
Read More ›Blue Wave Semiconductors has developed a large area scalable hot filament CVD tool for growing graphene. The tool has load-lock attachment for wafer transfer. Our process development using Blue Wave HFCVD plus system for graphene provide a wide...
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